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发明名称
Verfahren und Vorrichtung zur Bestimmung des Emissionsfaktors von Halbleitermaterialien durch Bestrahlung mit elektromagnetischen Wellen
摘要
申请公布号
DE19513749(B4)
申请公布日期
2004.07.01
申请号
DE19951013749
申请日期
1995.04.11
申请人
INFINEON TECHNOLOGIES AG;MATTSON THERMAL PRODUCTS GMBH
发明人
MAURER, MICHAEL;LERCH, WILFRIED;GSCHWANDTNER, ALEXANDER
分类号
G01J5/00;(IPC1-7):G01J5/10;G01J5/58;G01N21/55
主分类号
G01J5/00
代理机构
代理人
主权项
地址
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