发明名称 |
Crystallization apparatus and crystallization method |
摘要 |
A crystallization apparatus includes a mask and an illumination system which illuminates the mask with a light beam, the light beam from the illumination system becoming a light beam having a light intensity distribution with an inverse peak pattern when transmitted through the mask, and irradiating a polycrystal semiconductor film or an amorphous semiconductor film, thereby generating a crystallized semiconductor film. The mask includes a light absorption layer having light absorption characteristics according to the light intensity distribution with the inverse peak pattern.
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申请公布号 |
US2004126919(A1) |
申请公布日期 |
2004.07.01 |
申请号 |
US20030692798 |
申请日期 |
2003.10.27 |
申请人 |
TANIGUCHI YUKIO;MATSUMURA MASAKIYO |
发明人 |
TANIGUCHI YUKIO;MATSUMURA MASAKIYO |
分类号 |
H01L21/268;G03F1/00;G03F1/14;G03F7/00;G03F7/20;H01L21/336;(IPC1-7):G02B7/182;G02B5/08;G03B21/56;H01L21/00;G03F9/00 |
主分类号 |
H01L21/268 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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