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发明名称
VERFAHREN ZUR HERSTELLUNG VON WERKSTÜCKEN, DIE MIT EINER EPITAKTISCHEN SCHICHT BESCHICHTET SIND
摘要
申请公布号
DE59811474(D1)
申请公布日期
2004.07.01
申请号
DE1998511474
申请日期
1998.05.27
申请人
UNAXIS TRADING AG, TRUEBBACH
发明人
VON KAENEL, HANS;ROSENBLAD, CARSTEN;RAMM, JUERGEN
分类号
C23C16/503;C23C16/505;C23C16/511;C30B25/02;C30B25/10;C30B29/52;H01J37/32;H01L21/205
主分类号
C23C16/503
代理机构
代理人
主权项
地址
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