发明名称 |
Securing optical element holders together using screws, for projection lenses in microlithography, by measuring region of holder surface using interferometric measuring device, and varying torque to achieve uniform interference pattern |
摘要 |
The method involves using two or more screws. A reference region of the holder surface associated with one (10) of the screws is measured directly after screwing using an interferometric measuring device (12). The torque applied to the respective screw is varied based on the interferometric measurement data, so that a uniform interference pattern is produced. An Independent claim is included for a projection exposure system.
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申请公布号 |
DE10259599(A1) |
申请公布日期 |
2004.07.01 |
申请号 |
DE20021059599 |
申请日期 |
2002.12.19 |
申请人 |
CARL ZEISS SMT AG |
发明人 |
KUGLER, JENS;WEBER, ULRICH |
分类号 |
G02B7/00;G02B27/62;G03F7/20;(IPC1-7):G02B7/02 |
主分类号 |
G02B7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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