OPTICAL-IC CARD, OPTICAL-IC CARD READER, AND WAFER TRANSFER SYSTEM MOUNTED WITH OPTICAL-IC CARD AND OPTICAL-IC CARD READER, FOR PREVENTING LOWERING OF PRODUCTIVITY AND MUTUAL SIGNAL INTERFERENCE WITH PERIPHERAL SEMICONDUCTOR PRODUCTION EQUIPMENT

摘要

PURPOSE: An optical-IC card, an optical-IC card reader, and a wafer transfer system are provided to enable smooth loading and unloading of a carrier cassette by production equipment, to remove mutual signal interference with the peripheral production equipment, and to repeatedly change carrier cassette ID. CONSTITUTION: An optical-IC card comprises a transmitting and receiving unit receiving an optical signal, converting the optical signal into a corresponding electric signal, and transmitting an optical signal corresponding to the electric signal; a signal conversion unit(54) connected to the transmitting and receiving unit, to convert the signals for transmission and receiving; a control unit(55) controlling all action of an inner circuit; a memory unit(56) receiving the signal from the signal conversion unit and storing data corresponding to the signal; and a power unit(57) supplying power for driving each part of the inner circuit.