发明名称 Method and structure for vertically-stacked device contact
摘要 Method and structure for vertically stacking microelectronic devices are disclosed. Subsequent to appropriate deposition, patterning, trenching, and passivation subprocesses, a conductive layer is formed wherein one end comprises an external contact portion for C4 interfacing, and another end establishes electrical contact with an internal contact at the bonding interface between the two interfaced devices. The conductive layer may be formed using electroplating, and may be formed in a single electroplating treatment, to form a continuous structure from via portion to external contact portion.
申请公布号 US2004124509(A1) 申请公布日期 2004.07.01
申请号 US20020334196 申请日期 2002.12.28
申请人 KIM SARAH E.;LIST R. SCOTT 发明人 KIM SARAH E.;LIST R. SCOTT
分类号 H01L21/60;H01L21/768;H01L23/48;H01L25/065;(IPC1-7):H01L23/02;H01L21/44 主分类号 H01L21/60
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