Method and apparatus for forming a plurality of actuation devices on suspension structures for hard disk drive suspension

摘要

A method for manufacturing a microactuator device. The method includes providing a first sheet of material. The first sheet of material includes a plurality of gimbal structure regions. Each of the gimbal structure regions is spatially disposed on the first sheet of material. Each of the gimbal structure regions is capable of removal during a subsequent process. The method also includes providing a second sheet of material. The second sheet of material includes a plurality of actuator devices thereon. Each of the actuator devices is spatially disposed on the second sheet of material. Each of the actuator devices has an attachment surface. The method includes positioning the first sheet of material to the second sheet of material such that at least one of the attachment surface of one of the actuator devices is aligned with at least one gimbal region. The attachment surface of the one of the actuator devices is coupled with the gimbal region to connect the attachment surface with the gimbal region. The method also releases the one actuator device from the second sheet of material to free the actuator device from the second sheet of material. Depending upon the embodiment, there can be other steps, as well.