发明名称 Approaching apparatus using spectral shift for sample-probe distance regulation
摘要 An approaching apparatus based on spectral shift is disclosed, which includes a broadband light source, an optical-guide unit, and an optical receiving unit. The broadband light source emits a broadband light with the first central wavelength to the optical-guide unit and illuminates a sample via a probe within the optical-guide unit. A generated broadband light of the second central wavelength goes back the optical-guide unit via the original optical path to reach the optical receiving unit. Then, the receiving unit calculates the distance between the probe and the sample based on the characteristic curve of the approaching distance vs. the deviation of the first central wavelength. The deviation is used for feedback control so that the displacement driver moves the probe to adjust the distance between the probe and the sample.
申请公布号 US2004125383(A1) 申请公布日期 2004.07.01
申请号 US20030638433 申请日期 2003.08.12
申请人 INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE 发明人 LIN YAO-MIN;WANG HAU-WEI
分类号 G01B11/00;(IPC1-7):G01B11/14 主分类号 G01B11/00
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