发明名称 MIM capacitors and methods for fabricating same
摘要 Semiconductor devices and methods for making the same are described in which a single high k or ferroelectric dielectric layer is used to form decoupling capacitors and analog capacitor segments. Analog capacitors are formed by coupling analog capacitor segments in series with one another, wherein the capacitor segments may be connected in reverse polarity relationship to provide symmetrical performance characteristics for the analog capacitors.
申请公布号 US2004124496(A1) 申请公布日期 2004.07.01
申请号 US20030638596 申请日期 2003.08.11
申请人 RAO SATYAVOLU S. PAPA;HAIDER ASAD M.;TAYLOR KELLY;BURKE ED 发明人 RAO SATYAVOLU S. PAPA;HAIDER ASAD M.;TAYLOR KELLY;BURKE ED
分类号 H01L21/768;H01L21/02;H01L21/822;H01L27/04;H01L27/08;(IPC1-7):H01L33/00 主分类号 H01L21/768
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