| 摘要 |
According to the invention, in order to form a ZRBXCYNZ (OR X+Y+Z=1) layer, wherein x+y+z=1 and x=0.001 to 0.05, y= 0 to 0.95 and z=0 to 0.95, by chemical vapour deposition a processing gas is used in which a Zr halide content is higher than 5 % volume and a boron halide content is less than 5 % volume. The thus produced layers can be used as anti-wearing protection and as decorative layers. |
