PROCESS FOR PRODUCING CRYSTALLINE THIN FILM,申请号AU20030286430-传众专利搜索

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发明名称	PROCESS FOR PRODUCING CRYSTALLINE THIN FILM
摘要
申请公布号	AU2003286430(A1)	申请公布日期	2004.06.30
申请号	AU20030286430	申请日期	2003.12.09
申请人	CANON KABUSHIKI KAISHA	发明人	HIDEYA KUMOMI
分类号	C30B13/00;C30B13/24;H01L21/20;(IPC1-7):H01L21/20;C30B13/22	主分类号	C30B13/00
代理机构		代理人
主权项
地址

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