| 摘要 |
<p>A galvanometer controller (16) capable of control with stability and with immunity to changes with time and variation in environment temperature and having improved operability and expandability, and a laser machining apparatus having the galvanometer controller (16). The galvanometer controller (16) comprises a correcting arrangement formed in a digital circuit (12), the correcting arrangement having a distortion correction section (9) for correcting a working distortion of an optical unit including a lens, an orthogonality correction section (10) for correcting the orthogonality between the two axes of the galvanometer, and a linearity correction section (11a,11b) for correcting the linearity on each of the two axes. <IMAGE></p> |
