METHOD FOR MANUFACTURING PROBE FOR USE IN FLAT DISPLAY DEVICE INSPECTION, PROBE ACCORDING TO THIS AND PROBE ASSEMBLY PROVIDED WITH THE SAME

摘要

PURPOSE: A method for manufacturing a probe for use in a flat display device inspection, a probe according to this and a probe assembly provided with the same are provided, which are applied to the fine pitch of the highly integrated flat display device with providing a probe with a plurality of contact materials by using a micro electro mechanical system technology. CONSTITUTION: A method for manufacturing a probe for use in a flat display device inspection includes the steps of: forming a first protection pattern to define the region where the plurality of contact materials is formed; forming a conductive layer which fills the opening portion of the first protection layer pattern; forming the contact material made of a conductive material on the sacrificial substrate; forming a second protection layer pattern; forming an insulation plate by filing the insulation material into the second protection layer pattern; forming a third protection layer pattern to define the central portion of the contact material; forming a trench to open the contact material formed on the sacrificial substrate; attaching the reinforcement plate(42) inside of the trench; removing the second protection layer pattern and the third protection layer pattern; and finishing the probe by removing the sacrificial substrate.