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发明名称
Providing high precision resistance in an integrated circuit using a thin film resistor of controlled dimension
摘要
申请公布号
EP1411548(A3)
申请公布日期
2004.06.30
申请号
EP20030103821
申请日期
2003.10.15
申请人
TEXAS INSTRUMENTS INCORPORATED
发明人
PING KWOK, SIANG;BEACH, ERIC W.;STEINMANN, PHILIPP (NMI)
分类号
H01L21/02;H01L27/08;(IPC1-7):H01L21/70;H01L27/01;H01L21/033
主分类号
H01L21/02
代理机构
代理人
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地址
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