MULTI-CAPACITY 2 CHANNEL ION PUMP CONTROLLER AND VACUUM MEASURING METHOD USING THE SAME

摘要

PURPOSE: A multi-capacity 2 channel ion pump controller is provided to remarkably improve precision, by dealing with the characteristic of ion receptacles of various capacity, by simultaneously measuring two channels and by storing and referring to the result of an expensive ion pump controller by two inexpensive micro processors and a dual port memory. CONSTITUTION: The two-channel ion pump controller includes a calculating micro processor, a display micro processor and a dual port memory into/from which the micro processor can input/output. The calculating micro processor controls a high voltage switch for controlling a high voltage generator that generates a high voltage in a vacuum receptacle, a memory, an EEPROM(electrically erasable and programmable read only memory) for storing a parameter of each channel and the operation of an ADC(analog to digital converter) that converts the current value detected from the vacuum receptacle by a current detector. The display micro processor receives a parameter from a keyboard and outputs the parameter to the display. Two input terminals including the current detector are formed of a module type to input two channel inputs and are so constituted to receive an analog current value of each channel by using a multiplexer.