发明名称 Thin film structure that may be used with an adhesion layer
摘要 A conductive structure is disclosed. The conductive structure includes an interconnect and an adhesive layer including a bottom portion and an uppermost surface. The bottom portion is formed on the interconnect. The conductive structure also includes a first conductor, a dielectric and a second conductor. The first conductor has a thickness of less than six hundred Angstroms and includes a bottom portion and a side portion. The bottom portion of the first conductor is formed on the adhesive layer and the side portion extends above the uppermost surface of the adhesive layer. The dielectric has a lowermost surface formed on the bottom portion of the first conductor and another portion formed on the uppermost surface of the adhesive layer. The second conductor is formed on the dielectric.
申请公布号 US6757153(B2) 申请公布日期 2004.06.29
申请号 US20030413750 申请日期 2003.04.15
申请人 发明人
分类号 H01L21/02;(IPC1-7):H01G4/228;H01G4/08;H01L31/119 主分类号 H01L21/02
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