发明名称 |
Projection optical system, manufacturing method thereof, and projection exposure apparatus |
摘要 |
A projection optical system forms an image of an object in a first plane onto a second plane. The projection optical system has an optical element group including at least one refractive member and plural reflective members, and a plurality of lens-barrel units holding the optical element group divided into a plurality of respective groupings. The reflective members are all held by a single lens-barrel unit of the plurality of lens-barrels units.
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申请公布号 |
US6757051(B2) |
申请公布日期 |
2004.06.29 |
申请号 |
US20010883253 |
申请日期 |
2001.06.19 |
申请人 |
NIKON CORPORATION |
发明人 |
TAKAHASHI TETSUO;NISHIKAWA JIN;OMURA YASUHIRO |
分类号 |
G02B7/02;G02B13/00;G02B13/14;G02B17/08;G02B27/18;G03F7/20;H01L21/027;(IPC1-7):G03B27/54;G03B27/42;G03B21/26;A61N5/00;G02B26/08 |
主分类号 |
G02B7/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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