发明名称 |
Corona preionization assembly for a gas laser |
摘要 |
A preionization device for a gas laser includes an internal preionization electrode having a dielectric housing around it such that the preionization device is of corona type. The internal electrode connects to advantageous electrical circuitry, preferably external to the discharge chamber via a conductive feedthrough. The circuitry reduces the voltage across the dielectric tube of the preionization unit to reduce over-flashing at tube ends and oscillations due to residual energies stored in the dielectric. A semi-transparent mesh electrode between the preionization unit and the discharge area prevents field distortions and discharge instabilities.
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申请公布号 |
US6757315(B1) |
申请公布日期 |
2004.06.29 |
申请号 |
US20000692265 |
申请日期 |
2000.10.19 |
申请人 |
LAMBDA PHYSIK AG |
发明人 |
BRAGIN IGOR;BERGER VADIM;TASSY-JULIEN IVAN;STAMM UWE |
分类号 |
G03F7/20;H01S3/038;(IPC1-7):H01S3/22;H01S3/097 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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