METHOD FOR MANUFACTURING METAL STRUCTURE USING TRENCH

摘要

PURPOSE: A method for manufacturing a metal structure using a trench is provided to be capable of simplifying the manufacturing process and easily carrying out a post process. CONSTITUTION: A plurality of trenches are formed in a substrate(100). A seed layer(102) is deposited along the upper surface of the resultant structure. An insulating layer(103) is deposited on the seed layer. The insulating layer on the trenches is partially removed to expose the seed layer. The trenches are then filled with a metal layer(104). The insulating layer and the seed layer are removed from the resultant structure. Preferably, the insulating layer formed at the bottom of the trench is removed for obtaining a metal structure.