SYSTEM AND METHOD FOR CLEANING SURFACE PARTICLES OF COMPONENT IN LITHOGRAPHIC PROJECTION DEVICE FOR PREVENTING DEGRADATION OF OPTICAL PROPERTIES OF OPTICAL COMPONENTS, LITHOGRAPHIC PROJECTION DEVICE, AND MANUFACTURING METHOD OF DEVICE

摘要

PURPOSE: Provided are a system and a method for cleaning the surface of a component in a lithographic projection device, which remove particles in the vicinity of the surface to prevent degradation of optical properties. CONSTITUTION: The system(100) for removing contaminants(105) from at least a part of the surface(104) of component in a lithographic projection device comprises a cleaning particle supplier for cleaning particles in the vicinity of the surface of the component in the lithographic projection device. The cleaning particle supplier includes an electric field generator for generating an electric field(107). The system may further comprise an adjusting unit connected and communicated with the electric field generator for controlling at least one property of the electric field.