发明名称 |
Multilayer capacitive structure micrometric/nanometric internal space having process region producing final structure internal space with space extending part interface zone parallel interior surface/distanced surface |
摘要 |
The internal structure production technique has a process region to produce a final structure (12) providing an internal space (25). The space extends as part of the interface zone and is parallel to the interior surface at a distance to the interface.
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申请公布号 |
FR2849017(A1) |
申请公布日期 |
2004.06.25 |
申请号 |
FR20020016401 |
申请日期 |
2002.12.20 |
申请人 |
BRUEL MICHEL |
发明人 |
BRUEL MICHEL |
分类号 |
B81C1/00;C08F4/02;C08F4/64;C08F4/659;C08F4/6592;C08F210/16;(IPC1-7):B81C1/00 |
主分类号 |
B81C1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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