METHODS AND APPARATUS FOR PLASMA DOPING AND ION IMPLANTATION IN AN INTEGRATED PROCESSING SYSTEM,申请号KR20047006166-传众专利搜索

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发明名称	METHODS AND APPARATUS FOR PLASMA DOPING AND ION IMPLANTATION IN AN INTEGRATED PROCESSING SYSTEM
摘要
申请公布号	KR20040054745(A)	申请公布日期	2004.06.25
申请号	KR20047006166	申请日期	2002.10.17
申请人		发明人
分类号	H01L21/22;H01J37/317;H01J37/32;H01L21/223;H01L21/265	主分类号	H01L21/22
代理机构		代理人
主权项
地址

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