SEMICONDUCTOR MANUFACTURING CHAMBER SYSTEM HAVING JIG FOR PREVENTING WAFER FALLING

摘要

PURPOSE: A semiconductor manufacturing chamber system having a jig for preventing wafer falling is provided to restrain the damage of a wafer and improve productivity. CONSTITUTION: A semiconductor manufacturing chamber system is provided with a process chamber(20) for carrying out a predetermined process on a wafer(30) and a transfer chamber(25) for supplying the wafer to the process chamber. The semiconductor manufacturing chamber system further includes a jig(28) installed at the common end portion of the transfer and process chamber for being used as a protrusion for preventing the falling of the wafer. At this time, the jig has a tilt surface.