发明名称 |
ELECTRONIC DEVICE WITH ALUMINIUM ALLOY FILM AND PIXEL ELECTRODE CONNECTED DIRECTLY WITH EACH OTHER AND METHOD OF MANUFACTURING THE SAME, AND SPUTTERING TARGET |
摘要 |
PURPOSE: An electronic device and a method of manufacturing the same, and a sputtering target are provided to connect directly the second electrode to the first electrode and to reduce the contact resistance by using precipitates or a concentrated film of the second electrode. CONSTITUTION: An electronic device includes the first electrode and the second electrode. The first electrode(5) is made of metal oxide. The second electrode(29) is made of an aluminium alloy film. The second electrode is electrically and physically connected with the first electrode. At least a small amount of alloy constituents of the aluminium alloy film exists as precipitates or a concentrated film at an interface of the first and second electrodes. |
申请公布号 |
KR20040054590(A) |
申请公布日期 |
2004.06.25 |
申请号 |
KR20030093972 |
申请日期 |
2003.12.19 |
申请人 |
KABUSHIKI KAISHA KOBE SEIKO SHO |
发明人 |
GOTOH HIROSHI;KUGIMIYA TOSHIHIRO;NAKAI JUNICHI;TOMIHISA KATSUFUMI |
分类号 |
G02F1/1343;C23C14/18;C23C14/34;G02F1/1335;H01L21/28;H01L21/285;H01L21/3205;H01L21/336;H01L21/768;H01L21/77;H01L21/84;H01L23/52;H01L27/12;H01L27/13;H01L29/45;H01L29/49;H01L29/786;(IPC1-7):H01L29/786 |
主分类号 |
G02F1/1343 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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