| 摘要 |
PROBLEM TO BE SOLVED: To provide a sealing structure which can easily, quickly and accurately match the relative positional relationship between a front surface substrate and a back surface substrate without using a jig or a sensor. SOLUTION: A vacuum vessel is formed, by previously coating the peripheral edges of the front surface substrate and the back surface substrate with a sealing material, in a shape so as to previously have the peripheral edge of the front surface substrate engaged with the peripheral edge of the rear surface substrate with each other, facedly disposing the front surface substrate and the rear surface substrate to each other, and sealing the substrates by melting the sealing material. COPYRIGHT: (C)2004,JPO
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