Method of making subwavelength resonant grating filter

摘要

In accordance with the invention, a SRG filter is fabricated by disposing a moldable layer on the unpatterned grating layer, pressing a patterned molding surface into the moldable layer to produce an appropriate pattern of reduced thickness regions, removing material from the reduced thickness regions to expose the grating layer and processing the exposed grating layer to form a grating array. In a preferred embodiment the grating layer is adjacent a planar waveguiding layer overlying a substrate and the moldable material is a polymer resist. The waveguide layer advantageously has a refractive index greater than both the grating layer and the underlying substrate. And the pattern can be a one or two-dimensional array of grating elements.