发明名称 Production method of synthetic silica glass and thermal treatment apparatus
摘要 A thermal treatment apparatus includes a furnace of a refractory, a stage capable of carrying synthetic silica glass and moving between a first stage position for letting the synthetic silica glass into the furnace and a second stage position for letting the synthetic silica glass out of the furnace, a heat generator for heating the synthetic silica glass, and a driving section connected to the stage, for moving the stage between the first stage position and the second stage position. The thermal treatment apparatus also can include a rotational driving section for rotating the stage.
申请公布号 US2004118163(A1) 申请公布日期 2004.06.24
申请号 US20030725362 申请日期 2003.12.03
申请人 NIKON CORPORATION 发明人 YAJIMA SHOUJI;HIRAIWA HIROYUKI;ISHIDA YASUJI
分类号 C03B8/04;C03B19/14;C03B25/02;C03B32/00;C03C3/06;C03C23/00;(IPC1-7):C03B23/00 主分类号 C03B8/04
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