NEUTRAL PARTICLE BEAM PROCESSING APPARATUS WITH ENHANCED CONVERSION PERFORMANCE FROM PLASMA IONS TO NEUTRAL PARTICLES

摘要

There is provided a neutral particle beam processing apparatus with enhanced conversion performance from plasma ions to neutral particles. More specifically, there is provided a neutral particle beam processing apparatus comprising a high frequency electric power introducing part through which high frequency electric power is supplied, a plasma generating part which transforms gases from a gas injector into plasmas with the high frequency electric power, a neutral particle generating part that converts the obtained plasmas to neutral particles via collisions thereof with a heavy metal plate, and a treating part that treats the surface of a target with the neutral particle beams generated from the neutral particle generating part, wherein inclined slits or inclined holes are formed as beam penetration pathways on the heavy metal plate colliding with the plasmas.