发明名称 CURRENT-STABILIZING ILLUMINATION OF PHOTOCATHODE ELECTRON BEAM SOURCE
摘要 An electron beam source (100) has a photocathode (110) with a photoemitter material (112) having a work function, and with a beam receiving portion (116) and an electron emitting portion (130) . A first light source (120) directs a first light beam (122) onto the beam receiving portion (116) of the photocathode (110) to generate an electron beam (103) from the electron emitting portion (130). The first light beam (122) has a wavelength lambda1 such that hclambda1 is at least about the work function of the photoemitter material (112), where `h' is Planck's constant and `c' is the speed of light. A second light source (120) directs a second light beam (103) onto the beam receiving portion (116) of the photocathode (110), such as onto the beam receiving portion (116), to stabilize the electron beam (103). The second light beam (122) having a wavelength lambda2 such that he/lambda2 is less than about the work function of the photoemitter material (112).
申请公布号 WO2004053921(A2) 申请公布日期 2004.06.24
申请号 WO2003US39070 申请日期 2003.12.09
申请人 APPLIED MATERIALS, INC. 发明人 JANAWAY, GORDON;COYLE, STEVEN
分类号 H01J37/073 主分类号 H01J37/073
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