发明名称 MANUFACTURING PROCESS FOR A MULTILAYER STRUCTURE
摘要 <p>The present invention relates to a production process for a multilayer structure made of semiconductor materials, said structure comprising a substrate (20) made of a first semiconductor material and a superficial thin layer made of a second semiconductor material, the two semiconductor materials having substantially different lattice parameters, characterised in that the process comprises the following steps: -producing a layer (110) comprising said superficial thin layer on a support substrate (100), -creating an embrittlement zone in the ensemble (10) formed by said support substrate and said deposited layer, -bonding said ensemble with a target substrate (20), -detaching at the level of this embrittlement zone, -treating the surface of the resulting structure.</p>
申请公布号 WO2004053961(A1) 申请公布日期 2004.06.24
申请号 WO2003IB06397 申请日期 2003.12.05
申请人 SOITEC SILICON ON INSULATOR;MAZURE CARLOS 发明人 MAZURE CARLOS
分类号 H01L21/20;H01L21/762;(IPC1-7):H01L21/20 主分类号 H01L21/20
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