| 摘要 |
PROBLEM TO BE SOLVED: To provide a stage equipment or the like having a merit capable of shielding vibration accompanied by the movement of a stage unit or capable of highly accurate positioning in a vacuum region or the like. SOLUTION: The stage equipment is the combination of a coarse movement stage mechanism 1 and a fine movement table mechanism 101. A coarse movement stage 41 is engaged with the fine movement table mechanism 101 under noncontact condition whereby the fine table mechanism 101 is driven in a shape accompanied by the coarse movement stage 41. The fine movement table mechanism 101 is provided with a constitution, wherein a table base 103 arranged on the lower surface side of the coarse movement stage 41 is connected to a fine movement table 105 arranged on the upper side of the coarse movement stage 41 through four sets of Z-actuators 107. An electromagnetic support actuator 130 and a cap sensor 140 are respectively embedded into support wall members 120 at four corners on the upper surface of the table base 103. COPYRIGHT: (C)2004,JPO |
