| 摘要 |
PROBLEM TO BE SOLVED: To control inexpensively and surely the switching of opening and closing speed of a door while simplifying the adjustment of the same in order to prevent a carrier laid in the load port of semiconductor equipment from involving air. SOLUTION: Sensors 8, 9 are provided at only the closing position and the opening position of a door driving device 6 for opening, closing and moving a door 4 for the carrier 3 which receives a semiconductor wafer. When the door 4 is opened, the door is moved at a low speed Vd obtained as the function of the flow rate Vf of down flow from an FFU 5, a stroke X from the closed position to the switching position and the height H of the door, then, the door is moved at the low speed by a time t measured previously by a control device 10 after the detecting a signal of the closed position sensor 8 is outputted and, thereafter, the movement is switched into a high-speed movement. COPYRIGHT: (C)2004,JPO
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