发明名称 Semiconductor device and its manufacturing method
摘要 There is disclosed a semiconductor device comprising a substrate, a first insulating film which is provided above the substrate and has a relative dielectric constant which is at most a predetermined value, a second insulating film which is provided on a surface of the first insulating film and has a relative dielectric constant greater than the predetermined value, a wire which is provided in a recess for the wire, which is formed passing through the second insulating film and extending into the first insulating film, and a dummy wire provided in a recess for the dummy wire, which is formed passing through the second insulating film and extending into the first insulating film, and is located in a predetermined area spaced from an area where the wire is provided.
申请公布号 US2004119164(A1) 申请公布日期 2004.06.24
申请号 US20030640004 申请日期 2003.08.14
申请人 KURASHIMA NOBUYUKI;MINAMIHABA GAKU;FUKUSHIMA DAI;TATEYAMA YOSHIKUNI;YANO HIROYUKI 发明人 KURASHIMA NOBUYUKI;MINAMIHABA GAKU;FUKUSHIMA DAI;TATEYAMA YOSHIKUNI;YANO HIROYUKI
分类号 H01L21/3205;H01L21/768;H01L23/52;H01L23/522;H01L23/532;(IPC1-7):H01L23/48;H01L21/476 主分类号 H01L21/3205
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