ULTRAVIOLET LIGHT SOURCE, PHOTOTHERAPY APPARATUS USING ULTRAVIOLET LIGHT SOURCE, AND EXPOSURE SYSTEM USING ULTRAVIOLET LIGHT SOURCE

摘要

An ultraviolet light source (1) comprises a laser light source (10) for generating a signal light in the infrared region, a light amplifier (20) which comprises fiber light amplifiers (21, 22) and amplifies the signal light generated by the laser light source (10), and a wavelength converting optical system (30) which converts the signal light amplified by the light amplifier (20) to an ultraviolet light and outputs the converted light. The ultraviolet light source (1) uses a single-mode fiber laser (26) as an excitation light source for at least the fiber light amplifier (22) at one stage of the light amplifier (20).