| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To solve a problem that a practical application has been difficult since it is affected by a noise from the periphery in an electrostatic type or an electromagnetic type, while the electrostatic type or an electromagnetic type other than an optical detecting system has been used in many cases because of the disadvantage of providing insufficient sensitivity when reducing its size in an acoustic microphone, a pressure sensor and the like using the conventional optical displacement detecting mechanism. <P>SOLUTION: Light from a light emitting element 1 is brought into parallel to irradiate an object to be measured 2, and an optical element 3 using an optical characteristic in the vicinity of a critical angle is arranged in an optical path of reflected light therein to enhance detection sensitivity. The reflected light and transmitted light in a boundary face of the optical element 3 are detected using two photoreceiving elements 4, 5, outputs thereof are differential-processed respectively to enhance the sensitivity further and to reduce the size, and an optical displacement detecting mechanism of high sensitivity and low noise is provided thereby. <P>COPYRIGHT: (C)2004,JPO</p> |
