| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for removing the stuck residue of a releasable resin remaining on the surface of a peeled conductor layer by cleaning, and to provide a cleaning agent used therefor. SOLUTION: The stuck residue is preferably subjected to immersion cleaning with an alkali cleaning liquid comprising, by mass, 1 to 20% alkali hydroxide and a 0.1 to 5% alkali resistant dispersant in advance, is thereafter subjected to immersion cleaning with an acid cleaning liquid comprising 3 to 20% weak acid and 0.1 to 5% of at least one kind selected from the group consisting of ferric chloride, cupric chloride and copper sulfate, and is removed. COPYRIGHT: (C)2004,JPO
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