| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect inspection method, capable of clearly distinguishing a protrusion to be a defect from a foreign matter which is not to be a defect in the case of inspecting a protrusion defect in an object work through the use of laser light. SOLUTION: The surface of the work to be inspected 1 is irradiated with the laser light 19 via an S polarizing filter 18. A reflected light 23 from the work to be inspected is detected via an S polarizing filter 24. According to the level of the reflected light detected by an image processing device 30, a protrusion defect, in which the surface is protruded is distinguished from a foreign matter defect which adheres to the surface and alters the state of polarization of the incident laser light, and only the protrusion defect is detected. COPYRIGHT: (C)2004,JPO
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