| 摘要 |
PROBLEM TO BE SOLVED: To provide a washing method capable of efficiently washing and removing a harmful substance deposited on a surface of an object to be treated at low cost, and its apparatus. SOLUTION: In the washing method for removing the harmful substance deposited on the object to be treated, the harmful substance is removed by washing the object with a washing liquid in which isopropanol, octanol and water are mixed. COPYRIGHT: (C)2004,JPO
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