| 摘要 |
PROBLEM TO BE SOLVED: To reduce the burden of setting work for executing inspection for a plurality of inspection patterns, and to remarkably improve the working efficiency for inspection. SOLUTION: This automatic semiconductor inspecting device 10 is provided with an inspection data control means 20 for controlling a measuring pattern setting data and a processing pattern setting data for executing one of the inspection patterns as one inspection pattern setting data group, and for storing a plurality of kinds of the inspection pattern setting data groups, and a conveying means 16 for storing a plurality of semiconductor devices 12 to be conveyed to a measuring means 14 in order. The inspection pattern setting data group is selected from the inspection data control means 20 to conduct the setting for the execution of the inspection for the corresponding inspection pattern. COPYRIGHT: (C)2004,JPO
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