| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To surely avoid disorder like gas generation due to a residual substance or inadequacy of adhesion force of an emitter layer by optimizing baking treatment of the emitter layer. <P>SOLUTION: The manufacturing method of the electron emitting element comprises a process of forming a cathode electrode 5 on a supporting substrate 4, a process of forming an emitter layer 10 containing carbon nanotubes and a binder material on the cathode electrode 5 through a resistor layer 21, a process of baking the emitter layer 10 with a first baking temperature in open air, and a process of baking the emitter layer 10 with a second baking temperature higher than the first baking temperature in an inert gas atmosphere. <P>COPYRIGHT: (C)2004,JPO</p> |
