| 摘要 |
The invention relates to a device which is used to detect and correct measurement errors produced by an apparatus of the type used to measure the co-ordinates of a sample (2). The inventive device comprises at least one measuring sensor (3) and a sample-bearing surface (1) which are mounted such that they can slide in relation to one another along axes X or X, Y or X, Y, Z. Said device also comprises at least one control sensor (5) and a reference means. The aforementioned reference means comprises a reference plane (4) which is solidly connected to the sample-bearing surface (1) and the control sensor (5) can take co-ordinate measurements across the reference plane (4). The control sensor (5) and the measuring sensor (3) are positioned in line with one another in order to register variations in the position of the sample-bearing surface (1) in real time, by determining variations in the position of the reference plane (4) in line with the measuring sensor (3). |
