Interference layer system for mirror in UV spectral range, has alternating layers of differing refractive index in stack, and layer of third material of highest refractive index

摘要

Alternate layers of at least two different materials are formed in a stack, the first material (H) having a refractive index nH, and the second material having a refractive index nL, where nH is greater than nL. A layer of a third material is arranged on the side of the stack facing away from the light incidence side, and has a refractive index nB, where nB is greater than nH.