| 发明名称 |
SEMICONDUCTOR ACCELERATION SENSOR |
| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a semiconductor acceleration sensor for precisely measuring acceleration. <P>SOLUTION: The semiconductor acceleration sensor comprises a weight section 8; a frame 7 for enclosing the weight section 8 while separating the weight section 8; a thin flexible section 6 for supporting the weight section 8 at the frame 7 so that it can be rocked freely; a piezo resistor 9 for forming the flexible section 6 for outputting an electric signal according to the amount of deflection of the flexible section 6; and an electrode for taking out the output from the piezo resistor 9. A heat radiation fin 61 projecting in the thickness direction of the flexible section 6 is formed at the flexible section 6. <P>COPYRIGHT: (C)2004,JPO</p> |
| 申请公布号 |
JP2004177220(A) |
申请公布日期 |
2004.06.24 |
| 申请号 |
JP20020342577 |
申请日期 |
2002.11.26 |
| 申请人 |
MATSUSHITA ELECTRIC WORKS LTD |
发明人 |
SAITO HIROSHI;KATAOKA KAZUSHI |
| 分类号 |
G01P15/12;H01L29/84;(IPC1-7):G01P15/12 |
主分类号 |
G01P15/12 |
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