MICRO-DIMENSIONAL STANDARD SAMPLE AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To stick an index for indicating the direction of a diffraction grating pattern to a chip itself to judge the pattern direction accurately.

SOLUTION: A shape of the chip is made anisotropic, or a ruled line and a mark are formed on the chip, so as to decide the direction of the diffraction grating pattern direction by an appearance of the chip. Calibration work is executed accurately and surely because the direction of the diffraction grating pattern is able to be surely determined to attach the chip onto a sample table.

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