| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for removing deposition and a method for transporting a thin film using the device by which the deposition on both surfaces of a metal thin film 4 is removed and transported. SOLUTION: A spray means 5A and a suction means 6B are disposed on the under side of a first dust collector 2B moving in parallel to the upper surface of the metal thin film 4 which is mounted in layers. The spray means 5A sprays air against the surface of the metal thin film 4 and scatters the deposition on the surface of the metal thin film 4. The scattered deposition is sucked by the suction means 6B. While the dust collector 2A operates in such a manner, the dust collector 2A moves along the upper part of the metal thin film 4 and, thereby, the deposition on the surface of the metal thin film 4 is eliminated over the whole region. A spray means 5B and a suction means 6B are disposed on the upper part of a second dust collector 2B. While a second dust collector 2B is operated, the metal thin film 4 pass the upper side of the second dust collector 2B and, thereby, the deposition on the back surface of the metal thin film 4 is eliminated. COPYRIGHT: (C)2004,JPO
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