| 摘要 |
PROBLEM TO BE SOLVED: To measure a distance precisely while detecting unevenness in a region narrower than the width of a measurement electrode. SOLUTION: The non-contact displacement meter measures a surface shape of a work 1, wherein a probe 2 having an electrode 3 on a tip of the same is made to approach the measurement work 1, from a change in static capacitance made between the work 1 and the measurement electrode 3, a change in clearance between the measurement work 1 and the probe 2 is measured. The non-contact displacement meter is provided with a moving mechanism 7 which makes the measurement electrode 3 move along the surface of the measurement work 1 by relatively moving either one or both of the probe 2 or/and the measurement work 1, and an operation part 8 which detects the change of the static capacitance between the measurement work 1 and the measurement electrode 3, and performs an arithmetic operation of a change of clearance between the measurement work 1 and the measurement electrode 3. The operation part 8 detects the change of the static capacitance for every movement distance (t) which is the relative movement distance relatively moving either one or both of the measurement electrode 3 or/and the measurement work 1, and the movement ditance (t) is set narrower than the width (W) in the movement direction. COPYRIGHT: (C)2004,JPO
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