发明名称 [MASK ROM STRUCTURE AND MANUFACTURING METHOD THEREOF]
摘要 A mask read-only-memory structure and its method of manufacture are provided. The structure includes a substrate, a buried bit line in the substrate and a patterned stack layer covering a portion of the upper surface of the substrate. The stack layer includes a first dielectric layer, a stopping layer and a second dielectric layer. A gate oxide layer covers a portion of the upper surface of the substrate. A word line runs across the buried bit line to form a plurality of coding cells. The memory cells having a stack layer thereon are at a logic state "0" while the memory cells having a gate oxide layer thereon are at a logic state "1".
申请公布号 US2004121537(A1) 申请公布日期 2004.06.24
申请号 US20040707737 申请日期 2004.01.08
申请人 CHANG CHING-YU 发明人 CHANG CHING-YU
分类号 H01L21/8246;H01L27/112;(IPC1-7):H01L21/336 主分类号 H01L21/8246
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