发明名称 Very low moisture o-ring and method for preparing the same
摘要 Very low moisture o-rings are prepared by placing standard o-rings under vacuum in an inert atmosphere for a period of time sufficient to achieve a desired outgassing rate. Heat is not applied. While the o-rings are under vacuum, moisture is removed from the o-rings via diffusion transport.
申请公布号 US2004117968(A1) 申请公布日期 2004.06.24
申请号 US20020327321 申请日期 2002.12.20
申请人 ENICKS DARWIN G. 发明人 ENICKS DARWIN G.
分类号 C23C16/44;H01L21/00;(IPC1-7):B23P11/02 主分类号 C23C16/44
代理机构 代理人
主权项
地址