PREPARATION METHOD OF FERROELECTRIC SINGLE CRYSTAL MEMBRANE STRUCTURE

摘要

PURPOSE: A preparation method of a ferroelectric membrane structure using a single crystal having the excellent ferroelectric, electric and optical properties is provided to overcome a performance limit in a conventional part or member comprising a ferroelectric thin film or thick film. CONSTITUTION: The preparation method of a ferroelectric single crystal membrane structure comprises bonding the ferroelectric single crystal thin plate to a substrate(4) using a conductive adhesive or a metal layer as a medium. The preparation method also comprises grinding the ferroelectric single crystal thin plate in a thickness ranging from 1 to 100 micrometers before or after bonding the thin plate to the substrate. The bonding comprises applying the conductive adhesive between the crystal thin plate and the substrate and then heat treating the laminates at the temperature ranged from room temperature to 150 deg.C for 1 to 24 hours.