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经营范围
发明名称
Optischer Belichtungsapparat und optisches Reinigungsverfahren
摘要
申请公布号
DE69817663(T2)
申请公布日期
2004.06.24
申请号
DE19986017663T
申请日期
1998.04.22
申请人
NIKON CORP., TOKIO/TOKYO
发明人
MORI, TAKASHI;TAKAHASHI, TETSUO;NAKAMURA, HIROSHI;KUDO, YUJI
分类号
G03F7/20;(IPC1-7):G03F7/20
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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